Modeling and Simulation of Inductively Coupled Plasma (ICP)

AMEL, BELKEBIR and MOHAMMED, SALAH AGGOUNE (2018) Modeling and Simulation of Inductively Coupled Plasma (ICP). In: Eighth International Conference On Advances in Computing, Electronics and Electrical Technology - CEET 2018, 03-04 February, 2018, Kuala Lumpur, Malaysia.

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Abstract

The purpose of this paper is to present a simplified model of inductively coupled plasma (ICP). The study of the effect of parameters such as current and number of turns in the coil is simulated using Comsol Multiphysics 3.5 by applying the fluid dynamic models that are generally appropriate for the investigation of inductively coupled plasmas.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Thermal Plasmas, Inductively Coupled Plasma (ICP ), Electron Continuity Equation, Argon.
Depositing User: Mr. John Steve
Date Deposited: 10 Mar 2019 09:18
Last Modified: 10 Mar 2019 09:18
URI: http://publications.theired.org/id/eprint/228

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