Modeling and structure parameters design of the silicon resonant Pressure sensor

MOHAMED ., M. SHAGLOUF (2014) Modeling and structure parameters design of the silicon resonant Pressure sensor. In: International Conference on Advances In Engineering And Technology - ICAET 2014, 24 - 25 May, 2014, RIT, Roorkee, India.

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Abstract

Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Microsensor, beam, E-type round diaphragm, pressure, finite-element method.
Depositing User: Mr. John Steve
Date Deposited: 21 May 2019 11:44
Last Modified: 21 May 2019 11:44
URI: http://publications.theired.org/id/eprint/2610

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