Classification of Thin Film and Ultra Thin Film Deposition Metods

BOEV, B. and D., ANGELOVA and KARTUNOV, S. (2017) Classification of Thin Film and Ultra Thin Film Deposition Metods. In: Fifth International Conference on Advances in Mechanical and Robotics Engineering - AMRE 2017, 27-28 May, 2017, Rome, Italy.

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Abstract

Classification of thin film deposition methods - deposition of thin films of semiconductor materials plays a major role in many areas, especially research and development.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: nanocomposite films, nano-layers, PVD metods,CVD metods, deposition.
Depositing User: Mr. John Steve
Date Deposited: 15 Mar 2019 11:06
Last Modified: 15 Mar 2019 11:06
URI: http://publications.theired.org/id/eprint/467

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