Data Analysis of Optical Emission Spectroscopy: A DC Reactive Magnetron Sputtering of Titanium Dioxide Case

P., LIMSUWAN and S., CHAIYAKUN and S., LIMSUWAN and W., KONGSRI (2016) Data Analysis of Optical Emission Spectroscopy: A DC Reactive Magnetron Sputtering of Titanium Dioxide Case. In: Sixth International Conference On Advances in Computing, Electronics and Electrical Technology - CEET 2016, 26-27 November 2016, Kuala Lumpur, Malaysia.

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Abstract

An alternative approach for data analysis of optical emission spectroscopy was developed to overcome the dilemma of the low emission intensities and high sensitivity of the reconstruction on small errors of the line intensities. This work comprises of data analysis of an experimental dc reactive magnetron sputtering of titanium dioxide. The purposed method was based on several works and aimed to provide accuracy improvement of the method commonly employed in commercial systems. The wavelength calibration can be carried with the ease and without having to write calibration coefficients on the EEPROM. More accurate peak finding was obtained by coupling spectroscopic raw data processing with a Lorentzian line broadening and recognizing technique. The results are displayed with the advantages of the purposed method.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: —OES, wavelength calibration, spectroscopic raw data, Lorentzian lineshape, titanium dioxide
Depositing User: Mr. John Steve
Date Deposited: 20 Mar 2019 11:30
Last Modified: 20 Mar 2019 11:30
URI: http://publications.theired.org/id/eprint/674

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